As I said. Most likely an updated PCM program will fix.
Idle Vibration While Vehicle Is In Gear with Engine at Operating Temperature and A/C Off #01-T-22 - (Apr 16, 2003)
Idle Vibration While Vehicle is in Gear with Engine at Operating Temperature and A/C Off (Install Service PCM Calibration, if Required)
2000-2001 Saturn L-Series vehicles equipped with L61 (4 cyl) engine and automatic transaxle MN4.
Some customers may comment about an engine vibration at idle with the transaxle in gear, engine at normal operating temperature, and air conditioning Off.
This condition is caused by engine vibration being transmitted into the body of the vehicle due to insufficient commanded idle speed.
Reprogram the PCM with the new PCM Calibration as detailed in the following table in this bulletin.
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